A guide to hands-on MEMS design and prototyping by Joel A. Kubby

By Joel A. Kubby

No matter if you're a scholar taking an introductory MEMS direction or a practicing engineer who must wake up to hurry quick on MEMS layout, this functional consultant offers the hands-on event had to layout, fabricate and attempt MEMS units. you'll find out how to use foundry multi-project fabrication procedures for inexpensive MEMS tasks, in addition to computer-aided layout instruments (layout, modeling) that may be used for the layout of MEMS units. a variety of layout examples are defined and analysed, from fields together with micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. there is additionally a last bankruptcy on packaging and checking out MEMS units, in addition and routines and layout demanding situations on the finish of each bankruptcy. options to the layout problem difficulties are supplied online
''Whether you're a scholar taking an introductory MEMS direction or a training engineer who must wake up to hurry quick on MEMS layout, this sensible advisor offers the hands-on event had to layout, fabricate and attempt MEMS units. you'll how to use foundry multi-project fabrication tactics for inexpensive MEMS initiatives, in addition to computer-aided layout instruments (layout, modeling) that may be used for the layout of MEMS units. various layout examples are defined and analysed, from fields together with micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. there is additionally a last bankruptcy on packaging and checking out MEMS units, to boot and workouts and layout demanding situations on the finish of each bankruptcy. extra assets are supplied on-line, together with strategies to the layout problem difficulties and a variety of case stories of MEMS devices''--  Read more... computing device generated contents word: 1. creation; 2. Micro-mechanics; three. Electrostatics; four. Optical MEMS; five. Thermal MEMS; 6. Fluidic MEMS; 7. package deal and attempt; eight. From prototype to product: MEMS deformable mirrors for adaptive optics

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Some materials, mostly polymer foams, have a negative Poisson’s ratio; if these “auxetic” materials are stretched in one direction, they become thicker in perpendicular directions. 6 Comparison of axial stress and strain (left) with shear stress and strain (right). (Reprinted with permission from Prof. 6. The anchor applies an equal and opposite shearing force. 5 Beams in other situations 41 For an isotropic medium such as polysilicon, the shear modulus G and Young’s modulus E are related by G¼ E ; 2ð 1 þ n Þ ð2:17Þ where u is Poisson’s ratio.

Gianchandani and K. ) Another useful test structure is the bent-beam strain sensor that is used to measure residual tensile stress. 16 [7], [8]. Similar to a guitar string, the bent beam will tend to straighten under tensile residual stress, pulling the vernier outward. The bent beam will tend to bend further under a compressive residual stress, pushing the vernier inward. By including bent-beam strain sensors oriented in orthogonal directions, the directional dependence of the residual stress can be measured.

7 Membranes In addition to beams, MEMS devices such as pressure sensors also use membranes that are clamped around the edges. 13 Deflection of released membranes. (Left) Clamped circular diaphragm with thickness t and radius r subjected to a point load P at its center. (Middle) Clamped circular diaphragm subjected to a distributed load q N/m2 or Pa. (Right) Clamped square diaphragm with sides of length a subjected to a point load P at its center. (Reprinted with permission from Prof. 13. 8 Test structures It is important to include test structures in the layout to measure materials’ properties such as Young’s modulus, residual stress, and stressgradients that can vary with the processing conditions used to fabricate the MEMS devices.

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