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Wavelength scanning is replaced by that of angle of incidence! This sort of approach to ellipsometric spectroscopy is currently being carried out at our Institute. But a great deal of work needs to be done in this field. OF EXPERIMENTAL ELLIPSOMETRIC STUDIES Iv. EXAMPLES OF SOME SYSTEMS In this section we shall not try to give a comprehensive survey of the experimental work on ellipsometry. We consider it our task to list a number of typical examples that will allow a clear concept to be formed about the real possibilities of ellipsometric research methods and about the nature of the results that can be obtained when using these methods.
Table I11 presents the results of the measurements of angles $ and A and the values of the index of refraction and extinction coefficient estimated by these data following formulas (5% and b). The measurements were made at the angle of incidence cpo = 65”. 01 n . 6 Average A. V. RZHANOV AND K. K. SVITASHEV 52 The epitaxial film thickness is determined by the theoretical curve. To calculate it, one needs to know not only the optical constants of a substrate but the optical constants of a film as well.
2) Reflecting system : + 9,” r i r,” - r i 0 + r; 0 r i - r i rz 0 0 2rsrp cos A - 0 0 -2r,rp sin A 2r,rp sin A A. V. RZHANOV A N D K. K. SVITASHEV 26 (3) A compensator (birefringent crystal plate) : -1 M(YC,J) = 0 0 0 o 6 1 - 2 sin2 yc sin22 6 -sin 4yc sin22 sin2yc sin 6 o 6 -sin 4yc sina 2 -0 -sin 2yc sin 6 1 6 1 - cos2 2yc sin2 - cos 2yc sin 6 2 - cos 2yc sin 6 cos 6 (80) where yc is the angle between the s direction and a “fast” axis of the comare the phase shifts pensator. 6 = A&ow - A4fast and A4slow and that take place when the light beams pass through the compensator and are polarized along its “slow” and “fast” axes.