An Introduction to Microelectromechanical Systems by Nadim Maluf, Kirt Williams

By Nadim Maluf, Kirt Williams

Bringing you recent with the newest advancements in MEMS know-how, this significant revision of the best-selling An creation to Microelectromechanical platforms Engineering provides you with a present figuring out of this state-of-the-art expertise. You achieve useful wisdom of MEMS fabrics, layout, and production, and learn the way it truly is being utilized in business, optical, clinical and digital markets. the second one version positive factors fresh sections on RF MEMS, photograph MEMS, micromachining on fabrics except silicon, reliability research, plus an accelerated reference checklist.

With an emphasis on commercialized items, this specific source is helping you establish even if your software can take advantage of a MEMS answer, know the way different purposes and corporations have benefited from MEMS, and choose and outline a manufacturable MEMS method to your software. you find the right way to use MEMS expertise to permit new performance, increase functionality, and decrease measurement and value. The ebook teaches you the functions and obstacles of MEMS units and strategies, and is helping you converse the relative benefits of MEMS in your company’s administration. From serious discussions on layout operation and strategy fabrication of units and platforms, to a radical rationalization of MEMS packaging, this easy-to-understand e-book truly explains the fundamentals of MEMS engineering, making it a useful reference on your paintings within the box.

Show description

Read or Download An Introduction to Microelectromechanical Systems Engineering (2nd Edition) PDF

Best electronics books

Power Electronics and Instrumentation Engineering: International Conference, PEIE 2010, Kochi, Kerala, India, September 7-9, 2010. Proceedings

This e-book includes the simplest papers of the foreign convention on Advances in energy Electronics and Instrumentation Engineering, PEIE 2010, geared up by way of the organization of desktop Electronics and electric Engineers (ACEEE), in the course of September 7–9, 2010 in Kochi, Kerala, India. PEIE is a world convention integrating significant components of electric en- neering – strength electronics and instrumentation.

Electric Power System Applications of Optimization, Second Edition

Creation constitution of a widespread electrical energy method strength approach types energy procedure regulate strength process protection overview strength procedure Optimization as a functionality of Time evaluate of Optimization ideas appropriate to strength platforms electrical energy approach types advanced strength innovations Three-Phase platforms in keeping with Unit illustration Synchronous computing device Modeling Reactive power Limits top Movers and Governing platforms automated achieve keep an eye on Transmission Subsystems Y-Bus Incorporating the Transformer impact Load versions to be had move power Illustrative Examples persistent.

Extra info for An Introduction to Microelectromechanical Systems Engineering (2nd Edition)

Example text

The cut plane—the top surface of the wafer—is known as the orientation cut. The (100) wafers dominate in both MEMS and CMOS technology, but wafers are also readily available with (111) orientation and, to a lesser degree, (110) orientation. It should be noted that saying that the surface of a wafer has a particular orientation such as (100) is arbitrary; any orientation within the equivalent {100} group of planes, such as (001), can alternatively be selected. , [100]) is often used instead; all are intended to mean the same thing.

3 Optical reflectivity for silicon and selected metals. ) applications. For example, experiments have shown that silicon remains intact in the presence of Freon™ gases as well as automotive fluids such as brake fluids. Silicon has also proven to be a suitable material for applications such as valves involving the delivery of ultra-high-purity gases. In medicine and biology, studies are ongoing to evaluate silicon for medical implants. Preliminary medical evidence indicates that silicon is benign in the body and does not release toxic substances when in contact with biological fluids; however, it appears from recent experiments that bare silicon surfaces may not be suitable for high-performance polymerase chain reactions (PCR) intended for the amplification of genetic DNA material.

Important Material Properties and Physical Effects 27 to an externally applied voltage. The effect was discovered in quartz by the brothers Pierre and Jacques Curie in 1880 [22]. Its first practical application was in the 1920s when Langevin developed a quartz transmitter and receiver for underwater sound—the first Sonar! , as clock oscillators in computers and as ringers in cellular telephones). They are attractive for MEMS because they can be used as sensors as well as actuators, and they can be deposited as thin films over standard silicon substrates.

Download PDF sample

Rated 4.75 of 5 – based on 21 votes